Process for determining a dimension of an object

Details Process for determining a dimension of an object Process for determining a dimension of an object

1978-03-07

1980-10-14

Corbin, John K.

Optics: measuring and testing

By polarized light examination

With light attenuation

356 1, 356387, G01B 1100, G01C 320

Patent

active

042278139

ABSTRACT:
To determine a dimension of an object, two emitted beams whose axes define a known angle are directed by means of a deflector onto points of the object related to the dimension to be determined so that when one beam falls on the first of two points defining the dimension the other beam falls on the second point. Light rays reflected by the two points are received as two beams by means of a receiver. The angle of incidence of the emitted beam is measured with respect to a direction. The angles made respectively by the axes of the two received beams with the axes of the emitted beams are measured. The dimension is calculated from the angles.

REFERENCES:
patent: 3016464 (1962-01-01), Bailey
patent: 3610754 (1971-10-01), Pirlet
patent: 3899663 (1975-08-01), Pirlet
Kerr, J. R. "A laser-Thickness Monitor" IEEE Jr. of Quantum Electronics, 6-1969, pp. 338-339.
Eisenstadt et al. "Automatic Semiconductor Positioning System" IBM Tech. Disclosure Bull. vol. 4-1972, pp. 3370-3371.

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