Coating processes – Coating by vapor – gas – or smoke – Base includes an inorganic compound containing silicon or...
Patent
1984-05-18
1985-12-10
Childs, Sadie L.
Coating processes
Coating by vapor, gas, or smoke
Base includes an inorganic compound containing silicon or...
427 85, 427 95, 427 99, 4272553, 427314, C23C 1100, C23C 1300
Patent
active
045579504
ABSTRACT:
A process for chemical vapor deposition of borophosphosilicate glass on a silicon wafer at reduced pressure is disclosed herein. The process includes a step of placing a silicon wafer within a reactor tube. The reactor tube is evacuated to a pressure of less than 500 millitorr and is heated to a temperature of not less than 350.degree. C. and not greater than 500.degree. C. A mixture of silane, phosphine and boron trichloride gases is flowed into the reactor tube so that the mixture contacts the silicon wafer. At the same time, a quantity of oxygen is flowed into the reactor tube so that the oxygen also contacts the silicon wafer and intermixes and reacts with the silane, phosphine and boron trichloride gases to form layers of borophosphosilicate glass on the silicon wafer.
REFERENCES:
patent: 3481781 (1969-12-01), Kern
patent: 4098923 (1978-07-01), Alberti et al.
patent: 4191603 (1980-03-01), Garbarino et al.
patent: 4253417 (1981-03-01), Valentijn
patent: 4369031 (1983-01-01), Goldman et al.
patent: 4376796 (1983-03-01), Arrasmith et al.
patent: 4394401 (1983-07-01), Shioya et al.
patent: 4409424 (1983-10-01), Devaud
patent: 4433008 (1984-02-01), Schnable et al.
Kern et al., "Chemically Vapor-Deposited Borophosphosilicate Glasses for Silicon Device Applications", RCA Review, vol. 43, pp. 423-457, Sep. 1982.
Foster Thomas C.
Goldman Jon C.
Hoeye Gary W.
Childs Sadie L.
Thermco Systems, Inc.
Valentine James C.
Williamson John K.
LandOfFree
Process for deposition of borophosphosilicate glass does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Process for deposition of borophosphosilicate glass, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Process for deposition of borophosphosilicate glass will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-58461