Process for depositing on substrates, by cathode sputtering, a s

Details Process for depositing on substrates, by cathode sputtering, a s Process for depositing on substrates, by cathode sputtering, a s

1980-06-09

1982-04-13

Weisstuch, Aaron

Stock material or miscellaneous articles

Composite

Of metal

428698, 204192C, 204192EC, 368124, 368324, B32B 900, C23C 1500

Patent

active

043248039

ABSTRACT:
A metal chalcogenide coating, in particular of molybdenum sulphide, is deposited on a substrate by high speed cathode sputtering. This coating is turbostratic and has an unusually high resistance to wear produced by frictional forces.

REFERENCES:
T. Spalvins, "Tribological Properties of Sputtered MoS.sub.2 Films In Relation to Film Morphology", Thin Solid Films, vol. 73, pp. 291-297, (1980).
K. A. B. Andersson et al., "Morphologies of RF Sputter-Deposited Solid Lubricants", Vacuum, vol. 27, pp. 379-382, (1977).
R. I. Christy et al., "RF Sputtered MoS.sub.2 Parameter Effects on Wear Life", Thin Solid Films, vol. 64, pp. 223-229, (1979).
N. W. Price et al., "Sputtered Molybdenum Disulphide as a Lubricant for Instrument Slip Rings", Thin Solid Films, vol. 11, pp. 191-194, (1972).

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