Process for depositing layers having high specific electrical co

Details Process for depositing layers having high specific electrical co Process for depositing layers having high specific electrical co

1993-12-17

1995-03-07

Pianalto, Bernard

Coating processes

Measuring, testing, or indicating

427252, 427576, B05D 306

Patent

active

053956427

ABSTRACT:
A process for depositing metal-containing layers which have a high specific electrical conductivity, involving the decomposition of organometallic compounds in a hydrogen-containing gas or vapor phase by means of a plasma. The energy density of the plasma is optimized, which involves recording an OES spectrum. It is thus possible to produce, e.g., strongly adhering conductor tracks whose width is less than 50 .mu.m and whose ratio of height to width is greater than 1. Also disclosed are a method for optimizing the deposition of metal-containing layers having a high specific conductivity, and a composite body produced by the process of the invention comprising a polymer substrate and a metal layer deposited thereon.

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