Process for depositing a thin layer of a ceramic composition and

Details Process for depositing a thin layer of a ceramic composition and Process for depositing a thin layer of a ceramic composition and

1990-11-20

1993-09-14

Ryan, Patrick J.

Coating processes

Electrical product produced

Metallic compound coating

427226, 427404, 4274191, 428457, B05D 512

Patent

active

052446913

ABSTRACT:
A process for depositing a thin layer of a ceramic composition on a substrate, which comprises:

REFERENCES:
patent: 4481134 (1984-11-01), Angelini et al.
patent: 4485094 (1984-11-01), Rubler
patent: 4886654 (1989-12-01), Ohga et al.
patent: 4913708 (1990-04-01), Kalinowski
patent: 4937208 (1990-06-01), Yamamoto
patent: 4946710 (1990-08-01), Miller et al.
patent: 4960618 (1990-10-01), Tanitsu et al.
Proceedings of the 6. IEEE International Symposium on Applications of Ferroelectronics, Vest et al, "PbTiO.sub.3 Films . . . Precursors".
Patent Abstracts of Japan vol. 13, No. 63 (C-568) (3411) Feb. 13, 1989 and JP-A-63255375.
Sanchez et al. "Sol-Gel Chemistry from Metal Oxide Precursors" New J. Chem. 14(1990) pp. 513-521.
Sakka et al. "Preparation of Glasses and Ceramics for Electrical Use Based on Alkoxide and Unidirectional Solidification Methods" Jap. J. Appl. Phys. 22 (1983) Supp. 22-2 pp. 3-7.
Sayer et al. "Ceramic Thin Films: Fabrication and Applications" Science, 247 (1990), pp. 1056-1060.

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