Process for depositing a material on a substrate using light ene

Details Process for depositing a material on a substrate using light ene Process for depositing a material on a substrate using light ene

1996-12-20

1998-10-13

Pianalto, Bernard

Coating processes

Direct application of electrical, magnetic, wave, or...

Polymerization of coating utilizing direct application of...

427 96, 4273855, 427421, 427475, 427485, 427512, 427557, 427559, 427561, 427582, 427595, 437235, C08F 248

Patent

active

058209425

ABSTRACT:
The present invention is generally directed to a process and a system for transforming a liquid into a solid material using light energy. In particular, a solution containing a parent material in a liquid form is atomized in a reaction vessel and directed towards a substrate. The atomized liquid is exposed to light energy which causes the parent material to form a solid coating on a substrate. The light energy can be provided from one or more lamps and preferably includes ultraviolet light. Although the process of the present invention is well suited for use in many different and various applications, one exemplary application is in depositing a dielectric material on a substrate to be used in the manufacture of integrated circuit chips.

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