Process for degassing an aqueous plating solution

Details Process for degassing an aqueous plating solution Process for degassing an aqueous plating solution

2006-03-21

2006-03-21

Spitzer, Robert H. (Department: 1724)

Gas separation: processes

Selective diffusion of gases

Selective diffusion of gases through substantially solid...

C096S006000, C096S008000, C096S010000, C205S291000, C205S349000

Reexamination Certificate

active

07014679

ABSTRACT:
A process for removing oxygen from a copper plating solution is provided. The solution is passed through a degasser comprising a shell and hollow hydrophobic fiber porous membranes wherein the shell while a vacuum is drawn on the surfaces of the fibers opposite the fiber surfaces contacted by the solution. Gas passed through the fiber walls while liquid is prevented from infiltrating the fiber pores. The composition of the solution is monitored so that the composition can be retained substantially constant by adding components of the solution as needed.

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