Process for defined etching of substrates

Details Process for defined etching of substrates Process for defined etching of substrates

1990-09-10

1991-08-27

Schilling, Richard L.

Radiation imagery chemistry: process, composition, or product th

Transfer procedure between image and image layer, image...

Diffusion transfer process, element, or identified image...

430205, 430248, 430314, 430317, G03C 554

Patent

active

050432443

ABSTRACT:
A process is described for defined etching of holes using a sliver mask formed by silver diffusion transfer imaging.

REFERENCES:
patent: 3033765 (1962-05-01), King et al.
patent: 3424581 (1969-01-01), Nawn et al.
patent: 3464822 (1969-09-01), Blake
patent: 3600185 (1971-08-01), McGuckin
patent: 3822127 (1974-07-01), Tsuboi
patent: 3969541 (1976-07-01), Mukaida et al.
patent: 4192640 (1980-03-01), Merry
patent: 4925756 (1990-05-01), Cairncross

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