Coating processes – Coating by vapor – gas – or smoke – Metal coating
Patent
1987-10-19
1988-06-07
Childs, Sadie L.
Coating processes
Coating by vapor, gas, or smoke
Metal coating
427255, 4272551, 4273831, 427404, C23C 1608
Patent
active
047495979
ABSTRACT:
A process is disclosed for reducing lateral encroachment and silicon consumption in LPCVD of tungsten. The process comprises a low temperature deposition of a thin layer of tungsten, followed by annealing in nitrogen at high temperature, follows by deposition of a thick layer of tungsten.
REFERENCES:
patent: 4349408 (1982-09-01), Tarng et al.
patent: 4404235 (1983-09-01), Tarng et al.
patent: 4540607 (1985-09-01), Tsao
patent: 4584207 (1986-04-01), Wilson
patent: 4595608 (1986-06-01), King et al.
patent: 4650698 (1987-03-01), Moriya et al.
Mendonca John
Price J. B.
Rosler Richard S.
Childs Sadie L.
Spectrum CVD, Inc.
Wille Paul F.
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