Process for controlling indium clustering in ingan leds...

Semiconductor device manufacturing: process – Making device or circuit emissive of nonelectrical signal – Compound semiconductor

Reexamination Certificate

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C257S094000, C257SE33005

Reexamination Certificate

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07666696

ABSTRACT:
Exemplary embodiments provide MQW semiconductor devices and methods for their manufacture. The MQW semiconductor devices can be formed by growing a MQW active region over a nanoscale periodic strain array. By using the nanoscale periodic strain array, the position, size, and composition of the In-rich clusters in the MQW active region can be controlled. This control of In-rich clusters can result in tighter wavelength control, which can be important for applications, such as, for example, lasers and LEDs.

REFERENCES:
patent: 7485892 (2009-02-01), Ooi et al.
patent: 2002/0182765 (2002-12-01), Tran et al.

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