Process for collective manufacture of chips with electrodes sele

Details Process for collective manufacture of chips with electrodes sele Process for collective manufacture of chips with electrodes sele

1996-11-12

1998-07-07

Picardat, Kevin

Semiconductor device manufacturing: process

With measuring or testing

Packaging or treatment of packaged semiconductor

438 17, H01L 2166

Patent

active

057767912

ABSTRACT:
This process comprises the following steps:

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Sensors and Actuators A, vol. A43, Nos. 1-3, pp.296-301, Jan. 1, 1994, R. Kakerow, et al., "A Monolithic Sensor Array Of Individually Addressable Microelectrodes".
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