Coating processes – Spraying
Reexamination Certificate
2007-07-10
2007-07-10
Bashore, Alain L. (Department: 1762)
Coating processes
Spraying
C427S002100, C427S533000, C427S294000, C427S295000, C427S296000, C427S226000, C427S227000, C427S228000, C427S229000, C427S248100
Reexamination Certificate
active
10927782
ABSTRACT:
The present invention relates to an apparatus and process for producing a thin organic film on a substrate using an ultrasonic nozzle to produce a cloud of micro-droplets in a vacuum chamber. The micro-droplets move turbulently within the vacuum chamber, isotropically impacting and adhering to the surface of the substrate. The resulting product has a smooth, continuous, conformal, and uniform organic thin film, when the critical process parameters of micro-droplet size, shot size, vacuum chamber pressure, and timing are well-controlled, and defects such as “orange peel” effect and webbing are avoided. The apparatus includes an improved ultrasonic nozzle assembly that comprises vacuum sealing and a separate, independent passageway for introducing a directed purging gas.
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Berger Harvey L.
Brown Mark
Cerul James J.
Leiby Mark W.
McNeish Allister
BAE Systems Information and Electronic Systems Integration Inc.
Bashore Alain L.
Fulbright & Jaworski LLP
Garrett Mark
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