Process for coating diamond-like carbon film and coated thin str

Details Process for coating diamond-like carbon film and coated thin str Process for coating diamond-like carbon film and coated thin str

1994-02-15

1995-10-03

Padgett, Marianne

Coating processes

Direct application of electrical, magnetic, wave, or...

Ion plating or implantation

427530, 427523, 427562, 423446, 216 66, B05D 306, B01J 306, C23F 100

Patent

active

054550815

ABSTRACT:
A process for coating a substrate surface with a diamond-like carbon film, in which a starting material gas comprising a hydrocarbon compound is introduced into a Hall accelerator ion source with an inner pressure thereof reduced to 1.times.10.sup.-5 to 1.times.10.sup.-1 Torr, an ion beam in which 80% or more of the ion beams formed have an impinging energy in the range of 100 to 1500 eV is formed in the ion source, and irradiated onto a substrate comprising various kinds of materials in a vacuum chamber, to thereby coat the substrate surface with a diamond-like carbon film with a strong adhesion to an extent such that is can with stand practical application.

REFERENCES:
patent: 3961103 (1976-06-01), Aisenberg
patent: 4490229 (1984-12-01), Mirtich et al.
patent: 4541890 (1985-09-01), Cuomo et al.
patent: 4703222 (1987-10-01), Yoshikawa et al.
patent: 4795656 (1989-01-01), Mizoguchi et al.
patent: 4839195 (1989-06-01), Kitamura et al.
patent: 4862032 (1989-08-01), Kaufman et al.
patent: 4915979 (1990-04-01), Ishida et al.
patent: 4919779 (1990-04-01), Mizoguchi et al.
patent: 4933058 (1990-06-01), Bach et al.
patent: 5064682 (1991-11-01), Kiyama et al.
patent: 5094878 (1992-03-01), Yamamoto et al.
patent: 5185067 (1993-02-01), Shibahara et al.
patent: 5192523 (1993-03-01), Wu et al.
Lerner & Trigg, ed. Encyclopedia of Physics, "Nuclear Magnetic Resonance" by Walstedt pp. 831-833; 2nd edition, 1991 (no month).
Japanese abstract of 60-5882 by Noribumi Kikuchi et al Pub May 16, 1985.
K, Yoshikawa et al., Report of Research Project, No translation Grant-in Aid for Fusion Research, The Ministry of Education, Science and Culture, Mar. 1987.
K, Yoshikawa et al. Proc, 11th Symp. on ISIAT'87, Tokyo, pp. 129-132 (1987) Jun.
E. A. Pinsley and C. O. Brown, Journal of Spacecraft and Rockets, vol. 1. P. 525, Sep. 1964.
A. I. Morozov, A. Ya. kislov and I. P. Zubkov, Sov. Phys. TSTPLETT. No. 7, pp. 172-174, 1968.

Affiliated with

Also associated with

Rating

Process for coating diamond-like carbon film and coated thin str does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Process for coating diamond-like carbon film and coated thin str, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Process for coating diamond-like carbon film and coated thin str will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1076384