Coating processes – Electrical product produced – Integrated circuit – printed circuit – or circuit board
Patent
1987-11-12
1990-05-01
Niebling, John F.
Coating processes
Electrical product produced
Integrated circuit, printed circuit, or circuit board
427256, 204168, B05D 306, C07C 324
Patent
active
049217240
ABSTRACT:
In an apparatus for coating a substrate with an organic substance by placing the substrate in a coating chamber containing a gaseous hydrocarbon compound, in which the hydrocarbon compound can be broken down by means of a cathode system having magnets, a plasma is formed in the vicinity of the substrate by applying a radiofrequency voltage to the cathode system while the substrate is held immediately in front of the cathode. The pressure in the coating chamber and the supply of the electric energy from the generator to the cathode are variable for the purpose of achieving a coating quality that will change during the build-up of the coating. For this purpose, electric motor-powered valve means are inserted into the gas supply line and into the pump suction line and are operated through a timing mechanism or a control apparatus which is connected to a vacuum gauge.
REFERENCES:
patent: 4043889 (1977-08-01), Kochel
patent: 4201645 (1980-05-01), Riegert
patent: 4283260 (1981-08-01), Thomas et al.
patent: 4663008 (1987-05-01), Takeoka et al.
patent: 4713288 (1987-12-01), Kokaku et al.
patent: 4737415 (1988-04-01), Ichijo et al.
patent: 4755426 (1988-07-01), Kokai et al.
Hubert Peter
Kussel Barbara
Wirz Peter
Leybold-Aktiengesellschaft
Marquis Steven P.
Niebling John F.
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