Process for coating a photoresist composition onto a substrate

Details Process for coating a photoresist composition onto a substrate Process for coating a photoresist composition onto a substrate

1989-04-05

1991-02-26

Pianalto, Bernard

Coating processes

Electrical product produced

Welding electrode

427240, 427346, 427421, B05D 312

Patent

active

049960806

ABSTRACT:
A process for applying a film of uniform thickness of photoresist solids onto a substrate comprising the steps of:

REFERENCES:
patent: 4153201 (1979-05-01), Berger et al.
patent: 4301968 (1981-11-01), Berger et al.
patent: 4337896 (1982-07-01), Berger et al.
patent: 4352459 (1982-10-01), Berger et al.
patent: 4541564 (1985-09-01), Berger et al.
patent: 4642581 (1987-02-01), Erickson
patent: 4723708 (1988-02-01), Berger et al.
patent: 4806455 (1989-02-01), LaBianca
K. Shidmore, "Applying Photoresist for Optical Coatings", Semiconductor International, Feb. 1988, pp. 56-62.

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