Process for cleaning silicon mass and the recovery of nitric aci

Details Process for cleaning silicon mass and the recovery of nitric aci Process for cleaning silicon mass and the recovery of nitric aci

1992-10-28

1994-09-13

Lewis, Michael

Cleaning and liquid contact with solids

Processes

Including regeneration, purification, recovery or separation...

134 3, 134 12, 134 30, B08B 304

Patent

active

053465571

ABSTRACT:
In a process for cleaning a silicon mass with a acid washing solution, a waste solution containing a mixed acid composed of nitric acid and hydrofluoric acid is introduced to a distillation step, and hydrofluoric acid is introduced to a distillation cooling portion to prevent precipitation of silicon dioxide. The waste cleaning liquor is distilled to recover nitric acid.

REFERENCES:
patent: 4695327 (1987-09-01), Grebinski
patent: 4971654 (1990-10-01), Schnegg et al.

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