Superconductor technology: apparatus – material – process – Processes of producing or treating high temperature... – Heating – annealing – or sintering
Patent
1995-11-01
1997-03-04
King, Roy V.
Superconductor technology: apparatus, material, process
Processes of producing or treating high temperature...
Heating, annealing, or sintering
505473, 505742, 427 62, 134 21, B05D 512, B08B 504
Patent
active
056079001
ABSTRACT:
A process for removing contaminants from a surface of a thin film of oxide superconductor deposited on a substrate. The thin film of oxide superconductor is heat-treated in ultra-high vacuum at a temperature which is within a range of -100.degree. C. to +100.degree. C. of the temperature at which oxygen enter into the oxide superconductor.
The process is used for removing photo-resist from a surface of thin film of oxide superconductor and for producing a layered structure containing at least one thin film of oxide superconductor such as Y.sub.1 Ba.sub.2 Cu.sub.3 O.sub.7-x having a contaminated surface. On the cleaned surface, another thin film of oxide superconductor or non-superconductor is deposited. The resulting structure of layered thin films is used for fabricating superconducting transistor, Josephson junctions, superconducting circuits or the like.
REFERENCES:
patent: 5061687 (1991-10-01), Takada et al.
Sobolewski et al, "Cleaning of YBa2Cu307-x by Thermal Oxidation Treatments", American Vacuum Society Series 9, Conference Proceedings No. 200, 1989, pp. 197-204.
Watanabe et al, "XPS measurement of YBa2Cu30y compounds heated at various temperatures", Japanese Journal of Applied Physics, Part 2, Letters, vol. 27, No. 5, May 1988, pp. 783-785.
Yoshitake et al, "Effect of oxygen plasma annealing on superconducting properties of B12(Sr,Ca) 3Cu20x and YBa2Cu307-d thin films" Applied Physics Letters, vol. 56, No. 6, Feb. 5, 1990, pp. 575-577.
Patent Abstracts of Japan, vol. 014, No. 374, Aug. 13, 1990/JP-A-2137277 (Matsushita) May 25, 1990.
Tanaka et al, "Low energy ion scattering spectroscopy observations . . . " Applied Physics Letters, vol. 59, No. 27, Dec. 30, 1991, pp. 3637-3639.
Ohara et al., "Atmospheric Deterioration of clean surface of epitaxial (001)-YBaCuO films . . . ", Jap. Journal of Applied Physics, vol. 30, No. 12B Dec. 1991, pp. 2085-2087.
Tanaka et al, "Surface Analysis of C-axis oriented YBaCuO thin films by QMS, XPS, and LEED . . . ", Jap. Journal of Applied Physics, vol. 30, No. 88, Aug. 1991, pp. 1458-1461.
Kiryakov et al, "Investigation of the Gas Evolution from High-Tc Superconductivity Ceramic Y--Ba--Cu--O Heat Treated in Vacuum", Superconductivity: Physics, Chemistry, Technology vol. 3, No. 6, pt. 1 pp. 1057-1064, Jun. 1990.
Iiyama Michitomo
Inada Hiroshi
Nakamura Takao
Tanaka So
Kerins John C.
King Roy V.
Sumitomo Electric Industries Ltd.
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