Process for chemical vapor deposition of superconductive oxide

Details Process for chemical vapor deposition of superconductive oxide Process for chemical vapor deposition of superconductive oxide

1988-09-27

1990-06-05

Morgenstern, Norman

Superconductor technology: apparatus, material, process

High temperature , per se

Having tc greater than or equal to 150 k

427 62, 4272553, 4272552, 4272551, 427255, 4272481, 427314, 505730, C23C 1600, B05D 512

Patent

active

049314254

ABSTRACT:
A thin film of a high temperature superconductive oxide of rare earth metal-alkali earth metal-copper-oxygen system or group VA metal-alkali earth metal-copper-oxygen system, which has an excellent crystallinity, particularly a single crystalline structure, is formed on a substrate by a CVD method, in which halides of the metals and an oxygen source gas are separately flowed over a substrate and caused to react with each other over the substrate, to deposit a desired superconducting oxide film.

REFERENCES:
patent: 3982049 (1976-09-01), Mee et al.
patent: 4699800 (1987-10-01), Dustmann et al.
Bednorz et al., "Possible High Tc Superconductivity in the Ba--La--Cu--O System", Z. Phys. B-Condensed Matter 64, p. 189-193 (1986).
Maeda et al., "A New High-Tc Oxide Superconductor without a Rare Earth Element", Jpn. J. Appl. Phys., vol. 27, No. 2, Feb., 1988, p. 209-210.
Osofsky et al., "Experimental Program on High Tc Oxide Superconductors at the Naval Research Laboratory", MRS Conf. Proc. 4/23/87, p. 173-175.
Hammond et al., "Superconducting Thin Films of the Perovskite Super-Conductors by Electron-Beam Deposition", MRS Conf. Proc. 4/23/87, p. 169-171.
Mogro-Campero et al., "Superconducting Y--Ba--Cu--O Thin Films by Evaporation", MRS Pittsburgh, April, 1988, p. 113-116.
Berry et al. "Formation of High Tc Superconducting Films by Organo-Metallic Chemical Vapor Deposition", Appl. Phys. Lett. 52 (20) May, 1988, p. 1743-1745.

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