Process for casting on a support the faithfull reproduction of a

Details Process for casting on a support the faithfull reproduction of a Process for casting on a support the faithfull reproduction of a

1980-09-05

1983-06-21

Arnold, Bruce Y.

350320, G02B 518

Patent

active

043890946

ABSTRACT:
A process is disclosed which consists of choosing the wavelength of a plane incident wave to lie in the range 2d/3.ltoreq..lambda..ltoreq.2d, where d is the pitch of the slits so that there exist only two diffracted orders for each of the two half-spaces which are situated on each side of the plane of the mask, and in adjusting the angle of incidence of the plane wave so that the reflected diffracted order which is not the specularly reflected order is propagated in the direction opposite that of the incident wave.

REFERENCES:
patent: 1744642 (1930-01-01), Kondo
patent: 3680945 (1972-08-01), Sheridon
patent: 4132479 (1979-01-01), Dubroeucq et al.

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