Process for carbon dioxide recovery from a process tool

Details Process for carbon dioxide recovery from a process tool Process for carbon dioxide recovery from a process tool

2006-03-28

2006-03-28

Drodge, Joseph (Department: 1723)

Gas separation: processes

With control responsive to sensed condition

Temperature sensed

C095S026000, C095S243000, C095S247000, C095S258000, C134S010000, C134S902000

Reexamination Certificate

active

07018444

ABSTRACT:
A system for removing and purifying a carbon dioxide-containing stream from a batch process tool is provided. A multi-phase contaminated stream containing at least carbon dioxide and one or more co-solvent is removed from a process tool and conveyed to at least one intermediate pressure separator. The contaminant-containing stream is separated into an intermediate pressure carbon dioxide-enriched vapor stream and an intermediate pressure solvent and contaminant-enriched stream in the intermediate pressure separator.

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