Process depending on plasma discharges sustained by inductive co

Details Process depending on plasma discharges sustained by inductive co Process depending on plasma discharges sustained by inductive co

1997-05-30

2000-01-25

Scheiner, Laurie

Fishing, trapping, and vermin destroying

437228, 437233, 156643, 15619225, 20419232, H01L 2100

Patent

active

060172215

ABSTRACT:
A process for fabricating a product 28, 119. The process comprises the steps of subjecting a substrate to a composition of entities, at least one of the entities emanating from a species generated by a gaseous discharge excited by a high frequency field in which the vector sum of phase and anti-phase capacitive coupled voltages from the inductive coupling structure substantially balances.

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