Process control system using feed forward control threads based

Details Process control system using feed forward control threads based Process control system using feed forward control threads based

1997-12-12

2000-11-14

Grant, William

Data processing: generic control systems or specific application

Generic control system, apparatus or process

700 10, 700 17, 700 29, 700247, 39550039, G05B 1500

Patent

active

061482390

ABSTRACT:
A process control system using feed forward control threads based on material groups performs material tracking to account and adjust for variability of processing in a process flow that includes multiple machines, machine configurations, and machine setups. The process control system using feed forward control threads based on material groups distinguishes variations in processing parameters and characteristics for processed material samples and modifies processing at subsequent steps in response to the variations. The process control system using feed forward control threads based on material groups controls materials groups so that material samples with a like processing history are processed with a similar machine configuration or setup for subsequent processing steps. The tagging of material groups permits management of material having different process characteristics in a process flow to improve the efficiency of material scheduling by supplying information to assist sorting of materials based on a manufacturing signature.

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Hankinson et al., "Integrated Real-Time and Run-to-Run Control of Etch Depth in Reactive Ion Etching", Department of Electrical Engineering and Computer Science, University of Michigan, Ann Arbor, Michigan 48109-2122, Mar. 13, 1996, pp. 1-17.
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Boning et al., "Practical Issues in Run by Run Process Control", 1995 IEEE/SEMI Advanced Semiconductor Manufacturing Conference, pp. 201-208.

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