Coating processes – Measuring – testing – or indicating – Thickness or uniformity of thickness determined
Patent
1981-05-22
1982-11-09
Lusignan, Michael R.
Coating processes
Measuring, testing, or indicating
Thickness or uniformity of thickness determined
427 52, 427120, 427249, 427251, 4272552, 4272555, 4272557, 118665, 118620, 118718, 118725, B05D 500
Patent
active
043584730
ABSTRACT:
This invention relates to a process control system and method of controlling a chemical vapor deposition (CVD) process where a coating is deposited on a substrate heated by passing a current through the substrate to create a heating zone. The control system relies on detecting a signal induced on the coated substrate outside of the heating zone and using the induced signal to control one or more process parameters.
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patent: 3572286 (1971-03-01), Forney
patent: 3846224 (1974-11-01), Leclercq et al.
patent: 3907607 (1975-09-01), Chu et al.
patent: 4031851 (1977-06-01), Camahort
patent: 4068037 (1978-01-01), Debolt et al.
patent: 4300094 (1981-11-01), Piso et al.
Vossen et al., Thin Film Processes, 1978, Academic Press, NY, NY, pp. 287-289.
Debolt Harold E.
Morrissey Joseph
Suplinskas Raymond J.
Avco Corporation
Bueker Richard
Lusignan Michael R.
Ogman Abraham
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