Process control for laser wire bonding

Details Process control for laser wire bonding Process control for laser wire bonding

1988-03-08

1989-07-04

Westin, Edward P.

Radiant energy

Photocells; circuits and apparatus

Photocell controls its own optical systems

21912162, B23K 2600

Patent

active

048453544

ABSTRACT:
An optical process monitor primarily for use in laser wire bonding detects the reflectivity change of the wire being bonded in order to provide feedback control of the high power laser used for bonding the wire to a pad. A low power laser beam which is co-linear or combined with the high power laser beam is conducted to the bond site and reflected from the wire during the bonding cycle. The change in reflectivity of the wire during the bonding cycle is detected from the reflected low power laser beam. A signal commensurate with the detected change of reflectivity is used to control the power or duration of the high power laser during bonding.

REFERENCES:
patent: 3485996 (1969-12-01), Chiou et al.
patent: 4420260 (1983-12-01), Martinelli
Roshon, Jr.; "Laser Modulation Control Method"; IBM Technical Disclosure Bulletin; vol. 12, No. 3, Aug. 1969; p. 485.

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