Fluid handling – Line condition change responsive valves – With separate connected fluid reactor surface
Patent
1993-09-23
1995-10-10
Hepperle, Stephen M.
Fluid handling
Line condition change responsive valves
With separate connected fluid reactor surface
13750512, 137613, G05D 701
Patent
active
054562805
ABSTRACT:
To control the flow of air into and/or out of a process chamber, such as a clean room, a two-stage system is disposed in conduits leading into and/or out of the process-chamber. One stage includes a regulator, having a plenum (7, 79) disposed between the environment and the air source or the vacuum source. The regulator maintains in the plenum a pressure that is between the pressures of the environment and the source and that is a constant amount different from the environment's pressure. The regulator includes a piston (5) having a frontal face (52) exposed to air in the plenum flowing between the environment and the source, and a distal face (51) exposed to the environment's pressure. The piston is mounted so as to variably impede the flow of air through the regulator and so that the weight of the piston tends to move the piston in a direction so as to lessen the piston's impedance on the air flow. The other stage includes an adjustable valve (21, 25, 95), located between the regulator and the environment, for further impeding the flow of air.
REFERENCES:
patent: 1927972 (1933-09-01), Young
patent: 2803261 (1957-08-01), Carlson
patent: 2868225 (1959-01-01), Wigham et al.
patent: 2899973 (1959-08-01), Carlson
patent: 2918933 (1959-12-01), Boitnott
patent: 3053272 (1962-09-01), Babson
patent: 3138174 (1964-06-01), Gilpin
patent: 3194254 (1965-07-01), Zmek
patent: 3237616 (1966-01-01), Daigh
patent: 3312241 (1957-04-01), Bryant
patent: 3605788 (1971-09-01), Brown
patent: 3703913 (1972-11-01), Carsten
patent: 3741476 (1973-06-01), Travaglio
patent: 3742972 (1973-07-01), Hughes
patent: 3766933 (1973-10-01), Nicholson, Jr.
patent: 3806027 (1974-04-01), Ginn et al.
patent: 3820556 (1974-06-01), Millar et al.
patent: 3853143 (1974-12-01), DeLepeliere
patent: 3862644 (1975-01-01), Emmons et al.
patent: 3900045 (1975-08-01), Murrell
patent: 3978883 (1976-09-01), Petersen
patent: 3995656 (1976-12-01), Mills, Jr.
patent: 4039124 (1977-08-01), Ginn et al.
patent: 4092998 (1978-06-01), Taplin
patent: 4194526 (1980-03-01), Stromberg
patent: 4215627 (1980-08-01), Garriss
patent: 4250914 (1981-02-01), Ferrentino
patent: 4250915 (1981-02-01), Rikuta
patent: 4428529 (1984-01-01), Bentsen
patent: 4431020 (1984-02-01), Kowalski
patent: 4508140 (1985-04-01), Harrison
patent: 4528898 (1985-07-01), Sharp et al.
patent: 4592385 (1986-06-01), Semon
patent: 4706553 (1987-11-01), Sharp et al.
patent: 4732190 (1988-03-01), Polselli
patent: 4739924 (1988-04-01), Kelley
patent: 4768543 (1988-09-01), Weinke et al.
patent: 4773311 (1988-09-01), Sharp
patent: 4791956 (1988-12-01), Kominami et al.
patent: 4791957 (1988-12-01), Ross
patent: 4796660 (1989-01-01), Bron
patent: 4799511 (1989-01-01), Azimov
patent: 4873873 (1989-10-01), Day
patent: 4893551 (1990-01-01), Sharp et al.
patent: 4942921 (1990-07-01), Haessig et al.
patent: 4979527 (1990-12-01), Mueller et al.
patent: 5000221 (1991-05-01), Palmer
patent: 5005636 (1991-04-01), Haessig
patent: 5240455 (1993-08-01), Sharp
patent: 5251665 (1993-10-01), Schaufeld
patent: 5304093 (1994-04-01), Sharp et al.
Amminger, W. L., "Computational Valve Analysis," Proceedings of the Second National Fluid Power System and Controls Conference (University of Wisconsin, May 21-23, 11975).
LandOfFree
Process-chamber flow control system does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Process-chamber flow control system, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Process-chamber flow control system will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-2305018