Fluid handling – Line condition change responsive valves – With separate connected fluid reactor surface
Patent
1995-03-22
1997-09-09
Hepperle, Stephen M.
Fluid handling
Line condition change responsive valves
With separate connected fluid reactor surface
137599, G05D 701
Patent
active
056646003
ABSTRACT:
To control the flow of air into andr out of a process chamber, such as a clean room, a two-stage system is disposed within each of several parallel conduits leading into and/or out of the process-chamber. One stage includes a regulator, having a plenum disposed between the environment and the vacuum source. The regulator maintains in the plenum a pressure that is between the pressures of the environment and the vacuum source and that is a constant amount different from the environment's pressure. The regulator includes a piston having a frontal face exposed to air in the plenum flowing between the environment and the vacuum source, and a distal face exposed to the environment's pressure. The piston is mounted so as to variably impede the flow of air through the regulator and so that the weight of the piston tends to move the piston in a direction so as to lessen the piston's impedance on the air flow. The other stage includes an adjustable valve located between the regulator and the environment, for further impeding the flow of air.
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