Electrolysis: processes – compositions used therein – and methods – Electrolytic coating
Patent
1997-08-22
2000-01-25
Valentine, Donald R.
Electrolysis: processes, compositions used therein, and methods
Electrolytic coating
205640, 205687, 204224M, 204224R, 204212, 204222, 204225, 204267, C25D 700, C25D 502, C25D 712, C25F 330
Patent
active
060174374
ABSTRACT:
A processing chamber for depositing and/or removing material onto/from a semiconductor wafer when the wafer is subjected to an electrolyte and in an electric field. A hollow sleeve is utilized to form a containment chamber for holding the electrolyte. A wafer residing on a support is moved vertically upward to engage the sleeve to form an enclosing floor for the containment chamber. One electrode is disposed within the containment chamber while the opposite electrode is comprised of several electrodes distributed around the circumference of the wafer. The electrodes are also protected from the electrolyte when the support is raised and engaged to the sleeve. In one embodiment, the support and the sleeve are stationary during processing, while in another embodiment, both are rotated or oscillated during processing.
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Cho Peter
Holtkamp William H.
Ko Wen C.
Lowery Kenneth J.
Ting Chiu H.
Cutek Research, Inc.
Valentine Donald R.
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