Electricity: measuring and testing – Fault detecting in electric circuits and of electric components – Of individual circuit component or element
Reexamination Certificate
2011-03-29
2011-03-29
Nguyen, Vinh P (Department: 2858)
Electricity: measuring and testing
Fault detecting in electric circuits and of electric components
Of individual circuit component or element
C324S762050
Reexamination Certificate
active
07915905
ABSTRACT:
In an apparatus and method for monitoring defects in wafers, a monitoring circuit is fabricated on an area of each one of the wafers. The monitoring circuit includes representative devices that replicate similar devices located in a die area of the wafers. Defects if present in the representative devices contribute to a generation of a noise, thereby causing an imbalance in a differential signal measurable across selected ones of the representative devices. A digitizing circuit that uses a common mode voltage as a reference to measure the imbalance digitizes the differential signal to a digital signal, the digital signal being indicative of the noise generated by the defects. The digital signal is stored over a configurable time interval to form a digital bit stream. The digital bit stream is compared to a reference to determine whether the defeats are within an allowable range.
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Chandra Gaurav
Haroun Baher S.
Nagaraj Krishnaswamy
Rentala Vijaya Bhaskar
Shichijo Hisashi
Brady III Wade James
Neerings Ronald O.
Nguyen Vinh P
Telecky , Jr. Frederick J.
Texas Instruments Incorporated
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