Process and system for separation and recovery of perfluorocompo

Details Process and system for separation and recovery of perfluorocompo Process and system for separation and recovery of perfluorocompo

1997-01-16

1999-01-12

Spitzer, Robert

Gas separation: processes

Selective diffusion of gases

Selective diffusion of gases through substantially solid...

95 47, 95 90, 95 92, 95230, 95237, 96 4, 96 8, 96108, 96134, B01D 5322

Patent

active

058580654

ABSTRACT:
Processes and systems to recover at least one perfluorocompound gas from a gas mixture are provided. In one embodiment the inventive process comprises providing a gas mixture comprising at least one perfluorocompound gas and at least one carrier gas, the gas mixture being at a predetermined pressure; providing at least one size selective membrane having a feed side and a permeate side; contacting the feed side of the at least one membrane with the gas mixture; withdrawing from the feed side of the membrane as a non-permeate stream at a pressure which is substantially equal to the predetermined pressure a concentrated gas mixture comprising essentially the at least one perfluorocompound gas; and withdrawing from the permeate side of the membrane as a permeate stream a depleted gas mixture comprising essentially the at least one carrier gas.

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