Process and system for selective abatement of reactive gases and

Gas separation: processes – Compressing and indirect cooling of gaseous fluid mixture to... – And solid sorption

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95 45, 95 47, 95 53, 95 54, 95128, 95131, 95142, 95149, 96 4, 96 7, 96108, B01D 5322, B01D 5304

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active

057592373

ABSTRACT:
Processes and systems to recover at least one perfluorocompound gas from a gas mixture are provided. In one embodiment the inventive process comprises the steps of a) providing a gas mixture comprising at least one perfluorocompound gas and at least one carrier gas, the gas mixture being at a predetermined pressure; b) providing at least one glassy polymer membrane having a feed side and a permeate side; c) contacting the feed side of the at least one membrane with the gas mixture; d) withdrawing from the feed side of the membrane as a non-permeate stream at a pressure which is substantially equal to the predetermined pressure a concentrated gas mixture comprising essentially the at least one perfluorocompound gas; and e) withdrawing from the permeate side of the membrane as a permeate stream a depleted gas mixture comprising essentially the at least one carrier gas.

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