Process and structure of an integrated vacuum microelectronic de

Details Process and structure of an integrated vacuum microelectronic de Process and structure of an integrated vacuum microelectronic de

1995-06-07

1997-05-13

Ramsey, Kenneth J.

Electric lamp and discharge devices

Discharge devices having a multipointed or serrated edge...

445 50, H01J 902

Patent

active

056295790

ABSTRACT:
The present invention relates generally to a new integrated Vacuum Microelectronic Device (VMD) and a method for making the same. Vacuum Microelectronic Devices require several unique three dimensional structures: a sharp field emission tip, accurate alignment of the tip inside a control grid structure in a vacuum environment, and an anode to collect electrons emitted by the tip. Also disclosed is a new structure and a process for forming diodes, triodes, tetrodes, pentodes and other similar structures. The final structure made can also be connected to other similar VMD devices or to other electronic devices.

REFERENCES:
patent: 4721885 (1988-01-01), Brodie
patent: 4857799 (1989-08-01), Spindt et al.

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