Process and machinery for step-and-repeat vacuum-deposition of l

Details Process and machinery for step-and-repeat vacuum-deposition of l Process and machinery for step-and-repeat vacuum-deposition of l

1991-07-24

1993-02-16

Lawrence, Evan

Coating processes

Electrical product produced

Integrated circuit, printed circuit, or circuit board

427109, 427282, 118697, 118721, 118726, B05D 512, B05D 132, C23C 1604, C23C 1652

Patent

active

051869756

ABSTRACT:
Active matrix addressed liquid crystal TV sets configurated in the way described by A. G. Fischer in U.S. Pat. No. 3,840,695 can be enlarged to monolithic square-meter-sized wall TV panels. The large-area thin-film-electronic matrix circuit needed to address the superimposed liquid crystal layer can be vacuum-deposited from a multiple source evaporator onto one coherent glass pane through a number of small reticulated perforated sheet metal masks which are held successively against a chosen reticle of the large glass pane, in exact registration with each other and neighbouring reticles. The large glass pane must be precision-shifted in X-Y-reticle-steps for repeated vacuum depositions, in exact registration. The machinery required is described.

REFERENCES:
Brewer et al., "Apparatus for Depositing Thin Fiber Devices", IBM Technical Disclosure Bulletin, vol. 21, No. 7, Dec. 1978, pp. 3016-3018.

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