Process and installation for delivering ultra-pure helium

Details Process and installation for delivering ultra-pure helium Process and installation for delivering ultra-pure helium

1997-04-11

1999-06-29

Kilner, Christopher B.

Refrigeration

Storage of solidified or liquified gas

Liquified gas transferred as liquid

62908, F17C 902

Patent

active

059162473

ABSTRACT:
In order to deliver ultrapure helium to a utilization line (1), helium is withdrawn, in liquid or supercritical form, from a storage tank (3), it is filtered in this liquid or supercritical form (at 4), the filtered helium is vaporized and the resulting helium gas is sent to the utilization line (1). The process is applicable to the cooling of integrated-circuit wafers.

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