Single-crystal – oriented-crystal – and epitaxy growth processes; – Processes of growth from liquid or supercritical state – Having pulling during growth
Patent
1998-12-04
2000-10-17
Hiteshew, Felisa
Single-crystal, oriented-crystal, and epitaxy growth processes;
Processes of growth from liquid or supercritical state
Having pulling during growth
117218, 117222, 117900, C30B 3500
Patent
active
061325074
ABSTRACT:
A process and device for the production of a single crystal of semiconductor material is by pulling the single crystal from a melt, which is contained in a crucible and is heated by a side heater surrounding the crucible. The melt is additionally heated, in an annular region around the single crystal, by an annular heating device which surrounds the single crystal and is positioned above the melt.
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Ammon Wilfried Von
Tomzig Erich
Virbulis Janis
Hiteshew Felisa
Wacker Siltronic Gesellschaft fur Halbleitermaterialien AG
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