Process and device for the mixing of gases

Fluid handling – Processes – With control of flow by a condition or characteristic of a...

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137 88, 13762415, 1376242, G05D 1113

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active

043456103

ABSTRACT:
In an installation for treating workpieces by a glow discharge in a mixture of gases, the gas pressure is detected and valves for the various gases are cyclically and symmetrically opened and closed by amounts relative to the volumetric ratio of the gases.

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