Process and device for measuring ions

Details Process and device for measuring ions Process and device for measuring ions

2007-05-22

2007-05-22

Wells, Nikita (Department: 2881)

Radiant energy

With charged particle beam deflection or focussing

With detector

C250S310000, C250S287000, C250S281000

Reexamination Certificate

active

11015405

ABSTRACT:
The invention relates to a method and a device for the measurement of ions by coupling different measurement methods/techniques, a first detector being a collector (17) and a second detector being an SEM (18), and the ions to be measured or resulting secondary particles being selectively delivered to the collector or the SEM. The SEM (18) is operated selectively in analog mode or count mode. The collector (17) is provided with an integrator.

REFERENCES:
patent: 5471059 (1995-11-01), Freedman et al.
patent: 6091068 (2000-07-01), Prfitt et al.
patent: 2002/0175292 (2002-11-01), Whitehouse et al.
patent: 1132037 (1989-05-01), None
patent: 11096962 (1999-04-01), None

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