Process and device for coating the outer edge of a substrate...

Details Process and device for coating the outer edge of a substrate... Process and device for coating the outer edge of a substrate...

2005-11-07

2009-08-25

Fletcher, III, William Phillip (Department: 1792)

Coating processes

Nonuniform coating

Edge or border coating

C427S240000

Reexamination Certificate

active

07579044

ABSTRACT:
New baffles and methods of using these baffles are provided. The baffles comprise a body having an edge wall configured to direct the flow of a composition against a substrate (e.g., silicon wafer) edge. The edge wall comprises a vertical surface, a curved sidewall coupled to the vertical surface, and a lip coupled to the curved sidewall. A preferred baffle is annular in shape and formed from a synthetic resinous composition. Even more preferably, the baffle is not formed of a metal. The inventive methods comprise positioning the baffle adjacent a substrate during a spin coating process so that the edge wall causes the composition to cover the edges of the substrate and preferably a portion of the back side of the substrate.

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