Process and device for checking substrate wafers

Details Process and device for checking substrate wafers Process and device for checking substrate wafers

1978-03-17

1980-03-18

Mullins, James B.

Radiant energy

Photocells; circuits and apparatus

Optical or pre-photocell system

356371, 356445, G01N 2132

Patent

active

041941276

ABSTRACT:
Polished single crystal wafers are checked for defects by means of a method employing a optical microscope. The image is blurred by a translucent material and the transmitted light is then sensed by a light sensitive instrument which records the increased light intensity caused by a defect passing through the field of view. The position of the defects are then plotted automatically.

REFERENCES:
patent: 3782827 (1974-01-01), Niesenson et al.
patent: 3836787 (1974-09-01), Ash
patent: 4017188 (1977-04-01), Sawatari
patent: 4030837 (1977-06-01), Kojima et al.

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