Process and apparatus for workpiece coating

Chemistry: electrical and wave energy – Processes and products – Vacuum arc discharge coating

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Details

20429841, 20429826, 20429828, 20429836, C23C 1434, C23C 1432

Patent

active

057097844

ABSTRACT:
An arrangement and process for sputter etching high-performance tools with a low-voltage arc discharge is followed by coating the tools from the same direction from which they were etched, with a hard coating deposited onto the tools.

REFERENCES:
patent: 4448802 (1984-05-01), Buhl et al.
patent: 4529475 (1985-07-01), Okano et al.
patent: 4574179 (1986-03-01), Masuzawa et al.
patent: 4877505 (1989-10-01), Bergmann
patent: 4885068 (1989-12-01), Uramoto et al.
patent: 5234561 (1993-08-01), Randhawa et al.

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