Process and apparatus for vapor transfer of very high purity liq

Gas and liquid contact apparatus – Fluid distribution – Valved

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2611211, B01F 304

Patent

active

049044192

ABSTRACT:
By the present invention, a high purity liquid is vapor transported by a carrier gas from a bubbler system at room temperature. The bubbler system uses a split flow path for developing a predetermined high dilution ratio without the need for refrigeration. The quartz inner chamber containing the liquid is contained within and protected by a sturdy outer chamber. Two valves control the bubbler system and allow the internals of the system to be purged of all moisture and impurities before operative use. The lengths and diameters of the flow path tubes are calibrated to enable development of a highly diluted, predetermined vapor-to-carrier-gas ratio for a given total flow rate of carrier gas.

REFERENCES:
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patent: 2504009 (1050-04-01), Phillips et al.
patent: 2912018 (1959-11-01), Leech
patent: 2981526 (1961-04-01), Grumbach
patent: 3590902 (1971-07-01), Walker
patent: 3766914 (1973-10-01), Jacobs
patent: 3925033 (1975-12-01), Mayo
patent: 4563312 (1986-01-01), Takimoto et al.
patent: 4591464 (1986-05-01), Kaneno et al.

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