Process and apparatus for transferring an object and for process

Details Process and apparatus for transferring an object and for process Process and apparatus for transferring an object and for process

1992-12-03

1995-12-26

Huppert, Michael S.

Material or article handling

Apparatus for moving intersupporting articles into, within,...

Stack forming apparatus

414217, 414937, 414939, B65G 4905

Patent

active

054781957

ABSTRACT:
Apparatus for processing semiconductor wafers includes a load lock chamber with a first gate valve and a second gate valve so as to load and unload cassettes through the first gate valve, and to convey the wafers from the load lock chamber to a plurality of processing chambers through respective second valves. The load lock chamber is provided with a turntable which holds the plurality of cassettes. The turntable conveys each of the cassettes in front of respective ones of the second valves.

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patent: 5186594 (1993-02-01), Toshima et al.
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