Process and apparatus for the use of solid precursor sources in

Details Process and apparatus for the use of solid precursor sources in Process and apparatus for the use of solid precursor sources in

1992-12-21

1994-12-27

Green, Anthony

Coating processes

Coating by vapor, gas, or smoke

427226, 427229, 427250, 427252, 4272551, 4272552, 4272557, 427422, 427561, C23C 1606

Patent

active

053764099

ABSTRACT:
A process and apparatus for the use of liquid-source bubbler/delivery systems for the delivery of solid source precursors employed in the growth of advanced technical materials such as the deposition of copper films in microelectronic devices.

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patent: 5110622 (1992-05-01), Hasegawa et al.
patent: 5120703 (1992-06-01), Snyder et al.
patent: 5165960 (1992-11-01), Platts
Grant & Hackh, "Chemical Dictionary", fifth edition p. 365 [no month ] (1987).

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