Process and apparatus for the surface analysis of flexible mater

Details Process and apparatus for the surface analysis of flexible mater Process and apparatus for the surface analysis of flexible mater

1980-12-08

1983-01-11

Corbin, John K.

Optics: measuring and testing

By dispersed light spectroscopy

Utilizing a spectrometer

356359, 356430, G01B 902

Patent

active

043679510

ABSTRACT:
The surface character of flexible materials is examined by means of interference fields which are formed by reflection of light beams from a reflecting reference surface and from the adjoining surface to be examined, and subsequent super-position of the partial beams thereby formed. The interference field which corresponds to the surface profile standing out from the reference surface is utilized to determine the length and height of the surface profile, with the aid of the interference band spacings and the wavelength of the incident light.

REFERENCES:
patent: 3359851 (1967-12-01), Lipschutz et al.
patent: 3359852 (1967-12-01), Wcyczyuski et al.
patent: 3843261 (1974-10-01), Pryor
patent: 4222669 (1980-10-01), Frosch et al.
Edwards, "Microscope Interferometer", IBM Tech. Discl. Bull., vol. 16, No. 2, pp. 591-592, Jul. 1973.

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