Process and apparatus for the production of an orientation layer

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350320, G02F 1133

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active

047053593

ABSTRACT:
A process and apparatus for the production of an orientation layer on a plane surface of a plate, and a liquid crystal substrate plate produced thereby. By the process of evaporation from a source, orientation layers are deposited on the plane surfaces of a plurality of liquid crystal substrate plates used for application in liquid crystal displays. To obtain a uniform orientation of the optic axis of the liquid crystal with regard to the azimuthal alignment by means of the preferred direction caused by the orientation layer on the surface, the plates are moved in a direction crosswise to the evaporation direction during the evaporation process. The field of the particle stream emanating from the source is limited by an aperture in an aperture screen which is introduced between the source and the plates. The plates pass completely through the particle stream during the course of the evaporation operation. The finished plates include an approximately 5 nm thick orientation layer. In the apparatus, the plates are held in a wagon which is moved along rails by means of a toothed rack and a toothed pinion.

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Goodman et al "Topology of Obliquely Evaporated Silicon Oxide Films and its Effect on Liquid Crystal Orientation IEE Trans. on Electron Devices vol. Ed. 24 No. 7, Jul. 1977, pp. 795-804.
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