Coating processes – Measuring – testing – or indicating
Patent
1995-04-21
1997-04-08
Padgett, Marianne
Coating processes
Measuring, testing, or indicating
427567, 427527, 427529, 4272553, 20419213, C23C 1408, C23C 1600
Patent
active
056185758
ABSTRACT:
A process and apparatus for producing a metal oxide layer which is selectively permeable to ions of a given class, comprises evacuating a vacuum chamber, evaporating metal particles in the chamber and imparting to the particles kinetic energy which is at 10 eV maximum, introducing oxygen into the chamber with a quantity of oxygen being controlled to deposit a metal oxide on a substrate in the chamber, while the substrate is maintained below 900.degree. C.
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Balzers Aktiengesellschaft
Padgett Marianne
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