Process and apparatus for the measurement of object topographies

Details Process and apparatus for the measurement of object topographies Process and apparatus for the measurement of object topographies

1993-05-14

1995-01-03

Rosenberger, Richard A.

Optics: measuring and testing

By polarized light examination

With light attenuation

356243, 250237G, G01B 1124

Patent

active

053791070

ABSTRACT:
In a process and apparatus for measuring object topographies by means of projected fringe patterns, to enlarge the region of certainty, different periodicities are evaluated. Calibration of the measurement apparatus is carried out in at least two parallel planes, situated in the forward and in the rearward regions of the measurement volume. Corrected phase values are first calculated from the phase measurement values of the measurement object. By combination of the phase measurement values relating to the pattern of long periodicity and of the pattern of short periodicity, the fringe order of the phase values relating to short periodicity is calculated. By interpolation of the correction values between the two planes in which the reference measurements were carried out, the measurement process and a corresponding measurment apparatus provide highly accurate measurement values, with simultaneously reduced requirements on the accuracy of mechanical and/or optical adjustment.

REFERENCES:
patent: 4682894 (1987-07-01), Schmidt et al.
patent: 5085502 (1992-02-01), Womack et al.
patent: 5135308 (1992-08-01), Kuchel
patent: 5135309 (1992-08-01), Kuchel et al.
patent: 5146293 (1992-09-01), Mercer et al.

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