Coating processes – Spray coating utilizing flame or plasma heat
Reexamination Certificate
2011-06-21
2011-06-21
Cleveland, Michael (Department: 1712)
Coating processes
Spray coating utilizing flame or plasma heat
C204S298120
Reexamination Certificate
active
07964247
ABSTRACT:
A process for the manufacture of sputtering target comprises the steps of i) providing a substrate; ii) plasma melting of a material selected to form the sputtering target, yielding droplets of molten material; and iii) deposition of the droplets onto the substrate, yielding a sputtering target comprised of the coated layer of the material on the substrate. In some application, it might be preferable that the substrate be a temporary substrate and iv) to join the coated temporary target via its coated layer to a permanent target backing material; and v) to remove the temporary substrate, yielding a sputtering target comprised of the coated layer of the material on the permanent target backing material. The plasma deposition step is carried out at atmospheric pressure or under soft vacuum conditions using, for example, d.c. plasma spraying, d.c. transferred arc deposition or induction plasma spraying. The process is simple and does not require subsequent operation on the resulting target.
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Boulos Maher I.
Jurewicz Jerzy W.
Cleveland Michael
Genieser Lars H.
Kinberg Robert
Tekna Plasma Systems Inc.
Venable LLP
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