Process and apparatus for the focusing of a beam of light on an

Details Process and apparatus for the focusing of a beam of light on an Process and apparatus for the focusing of a beam of light on an

1983-06-15

1986-01-28

Nelms, David C.

Radiant energy

Photocells; circuits and apparatus

Photocell controls its own optical systems

356 4, G01J 120

Patent

active

045673624

ABSTRACT:
A laser beam impacts an object through a focusing lens. The beam spot produced on the object is reproduced by means of an optical assembly of three measuring diaphragms in the form of a stripe of a width varying as a function of the state of focusing, with the measuring diaphragms being mutually offset with respect to the ideal focusing point. The light passed by the measuring diaphragms impacts three photoreceivers and the measuring signals produced by them are processed in an evaluating stage to produce a correction signal which then is used for the automatic setting of the focus by means of a control device. The system requires no mechanically oscillating parts, is simple in its configuration and suitable for pulsed laser systems.

REFERENCES:
patent: 3614456 (1971-10-01), Hamisch
patent: 3682071 (1972-08-01), Hosoe
patent: 3689159 (1972-09-01), Taniguchi et al.
patent: 3781110 (1973-12-01), Leitz et al.
patent: 3902036 (1975-08-01), Zaleckas
patent: 3906220 (1975-09-01), Delingat
patent: 4074104 (1978-02-01), Fulkerson
patent: 4341953 (1982-07-01), Sakai et al.
"Optical Profilometer for Monitoring Surface Contours of Si Power Devices", H. P. Kleinknecht and H. Meier, Laboratories RCA Ltd., pp. 266-273.

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