Process and apparatus for the deposition on a substrate of a thi

Details Process and apparatus for the deposition on a substrate of a thi Process and apparatus for the deposition on a substrate of a thi

1985-08-13

1987-06-23

Smith, John D.

Coating processes

Electrical product produced

Condenser or capacitor

156600, 156621, 427 87, 427402, 4274191, 4274192, 4274197, 4274301, 427435, C30B 700, B05D 138

Patent

active

046752072

ABSTRACT:
The invention relates to a process for the depositing on a substrate a thin film or layer of a compound having at least one cationic constituent C and at least one anionic constituent A, such as zinc sulphide.
On the substrate are formed at least two superimposed ionic layers respectively incorporating the said cationic constituent or constituents C and the said anionic constituent or constituents A by successively immersing the substrate in a first solution e.g. containing a salt of C, such as zinc sulphate and in a second solution eg containing a salt of A, such as sodium sulphide, while rinsing the substrate between two immersion operations.

REFERENCES:
patent: 3466190 (1969-09-01), Yamushita et al.
patent: 4061930 (1977-12-01), Greenberg
R. N. Bhattacharya et al., "New Chemical Methods for the Deposition of Cu.sub.1.8 S and TlSe Thin Film", Bull. Mater. Sci., vol. 3, No. 4, Dec. 1981, pp. 403-405, 407, 408.
N. R. Pavaskar et al, Photoconductive Films by a Chemical Bath Deposition Process, Solid-State Science and Technology, May 1978, pp. 743-748.
Y. F. Nicolau, Solution Deposition of Thin Solid Compound Films by a Successive Ionic-Layer Adsorption and Reaction Process, Applications of Surface Science 22/23 (1985) pp. 1061-1074.

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