Chemistry of inorganic compounds – Modifying or removing component of normally gaseous mixture – Halogenous component
Reexamination Certificate
2007-08-28
2007-08-28
Page, Thurman K. (Department: 1621)
Chemistry of inorganic compounds
Modifying or removing component of normally gaseous mixture
Halogenous component
C423S244010, C423S244020, C588S253000
Reexamination Certificate
active
10987156
ABSTRACT:
Fluorine compounds such as C2F6, CF4, CHF3, SF6and NF3, are made to contact with a fluorine compound decomposition catalyst and a catalyst for the decomposition of at least one of CO, SO2F2and N2O in the presence of water or in the presence of water and oxygen. The catalyst for the decomposition of at least one of CO, SO2F2and N2O preferably contains at least one selected from Pd, Pt, Cu, Mn, Fe, Co, Rh, Ir and Au in the form of a metal or an oxide. According to the invention, the fluorine compound can be converted to HF, which can be absorbed by water or an alkaline aqueous solution. Furthermore, a substance such as CO, SO2F2and N2O which is formed by decomposition of the fluorine compound can also be decomposed.
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Azuhata Shigeru
Honji Akio
Irie Kazuyoshi
Kanno Shuichi
Tamata Shin
Hitachi , Ltd.
Mattingly, Stanger, Malur & Brundidge, PC.
Nwaonicha Chukwuma
Page Thurman K.
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